Bipolar unit for dual cathode MFU-20K

MFU-20K

MFU-20K is a unit which converts the DC output into bipolar pulse output, by adding to ULVAC DC power generator (DPG series). It contributes to improved productivity and throughput at low cost.

Features

・Wide frequency range
Can be operated from 10k ~ 100kHz ※1

・Enables the larger capacity by a master/slave connection
Parallel operation of maximum six MFU-20K is possible.

・DC output is possible
It is possible to apply an output of input DC power generator to a cathode directly. ※2

Applications

・ Reactive sputtering equipment for FPD

・ Reactive sputtering equipment for industrial coating

・ Reactive sputtering equipment for color TFT

・ All sputtering equipment

Specifications