DC Power generator DPG-10/DPG-20
The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.
Light-weight and space-saving design with excellent installation flexibility.
- Selectable output voltage range
We feature a lineup with 800V specification in addition to 1000V specification.
- Extensive arc handling
Extensive arc control methods familiar with plasma.
- Requires no cooling water
Forced air cooling, requires no cooling water.
- Can be equipped with a high-speed arc shutoff circuit
Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.
- Can be equipped with a flexible parallel operation function
DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12units to work together in parallel operation. (240kW max)
- Flat panel display sputtering
- Semiconductor sputtering
- Touch panel sputtering
- Industrial coating sputtering
|Input specification||Rated input voltage||208VAC|
|Input voltage fluctuation range||187 to 229VAC|
|Phase, frequency||Three phase, 50/60Hz|
|Input connector||Connector connection|
|Input capacity||13.5kVA or less||25kVA or less|
|Output specification||Maximum rated power||10kW||20kW|
|Output polarity||Negative polarity|
|Abnormal discharge control||Shutoff by inverter stop or high-speed arc shutoff circuit*1when abnormal discharge is detected|
|Output connector||Connector connection|
|Control||Control method||Constant power control (P control)/constant current control (I control)/constant voltage control (V control)|
|Control precision||±1% or less of rated output|
|Control warranty scope||Constant power control, 10 to 100% of rated power value|
|Parallel operation||Up to 12units can be controlled by master/slave communication*2|
|Cooling method||Forced air-cooling|
|Dimension (WxDxH) excluding protrusions||483mm x 630mm x 133mm|
|Applicable standard||CE and SEMI F47|
|Ambient operating temperature 10ºC〜 40ºC (no condensation)|
|Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.|
|*2:800V specification units and 1000V specification units cannot be used together.|