DC Power Supply DCS series

DCS

As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications. Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.

Features

  • Improvement in output regulation (Operates in 1% to 100% of rated)
  • Wide range of output without tap changing
  • Two types of arc detection function are equipped
  • Countermeasure for extraneous noise by isolation (option)
  • Selectable from three types of operation mode (power / current / voltage)
  • Floating output up to +100V

Applications

  • For Al, Ni and other metal sputtering processes
  • Power supply for bias

Specifications

Model DCS0052B DCS0202B DCS0402B
Maximum output power 500W 2kW 4kW
Output range Power 5W to 500W 20W to 2000W 40W to 4000W
Voltage 80V to 800V
Current 0.0012A to 1.25A 0.005A to 5A 0.1A to 10A
External dimensions
(WDH) mm		 240 x 450 x 99 480 x 430 x 124
Weight 9kg 22kg