DC Power Supply DCS series
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As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications. Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.
Features
- Improvement in output regulation (Operates in 1% to 100% of rated)
- Wide range of output without tap changing
- Two types of arc detection function are equipped
- Countermeasure for extraneous noise by isolation (option)
- Selectable from three types of operation mode (power / current / voltage)
- Floating output up to +100V
- For Al, Ni and other metal sputtering processes
- Power supply for bias
Model | DCS0052B | DCS0202B | DCS0402B | |
Maximum output power | 500W | 2kW | 4kW | |
Output range | Power | 5W to 500W | 20W to 2000W | 40W to 4000W |
Voltage | 80V to 800V | |||
Current | 0.0012A to 1.25A | 0.005A to 5A | 0.1A to 10A | |
External dimensions (WDH) mm |
240 x 450 x 99 | 480 x 430 x 124 | ||
Weight | 9kg | 22kg |