The DPG-2/DPG-4 are 2 kW/4 kW DC power generators for sputtering. Repeatability is excellent because of high control accuracy
・High control precision
High precision of ±1% of set value even in a low power region of below 10%.
・Wide accuracy guarantee
Guarantee the wide range power control from 1 to 100%.
Light-weight and space-saving design with excellent installation flexibility.
・ Requires no cooling water
Forced air cooling, requires no cooling water.
Our accumulated knowledge as an equipment manufacturer has been reflected in the design.
・ Sputtering equipment for R&D
・ BIAS power supply of sputtering equipment