EB Power Generator HPS-N Series
The HPS-N Series is a series of power generator that support electron beam evaporation sources and feature improvements in circuit stability and performance based on technologies we have accumulated over many years and our proven track record. When used in combination with the EGC-10GS EB Gun Controller, both EG guns for optical films and EB guns for metal films can be supported.
Features
- Requires no cooling water
Forced air-cooling, requires no cooling water - High reliability
Our accumulated knowledge as an equipment manufacturer has been reflected in the design - Easy to use
The LCD touch panel used for the control panel improves ease of use - Sweep waveform variations
Many beam scan forms can be created on the operating screen - High-speed arc shutoff function
Configured with a circuit that minimizes decreases in deposition rate by high-speed arc shutoff - Low level arc control function (option for optical applications)
Controls minute arcs that occur in optical applications to allow stable deposition
- Vacuum evaporation for metal films
- Vacuum evaporation for optical films
Model | HPS-600N | HPS-1000N | ||
Input specification | Phase, frequency | Three phase, 50/60Hz | ||
Input voltage | 200 to 220VAC | |||
Fluctuation range | 190 to 231VAC | |||
Input capacity | 1 source | 9.0kVA or less | 14.0kVA or less | |
2 sources | 10.0kVA or less | 15.0kVA or less | ||
Leakage current | Each phase 5mA or less | |||
Output specification | Rated output power | 1 source | 6kW | 10kW |
2 sources | 6kW (Matched to each source output) |
10kW (Matched to each source output) |
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High-voltage output voltage | Variable range | -2 to -6kV | -4 to -10kV | |
Stability | ±1% or less | |||
Ripple ratio | ±2%p-p or lower (at each rated output) | |||
Beam current | Variable range | 0 to 1000mA | ||
Regulation | ±2% or lower (at each rated output) | |||
Filament output | Voltage | 0 to 6V/12VAC | ||
Current | 0A to 45A max | |||
High-voltage flashover protection |
Operating method | Switching method by semiconductor device | ||
High-voltage shutoff time | 1 ms or less (high voltages off in approx. 1 second in mechanical short circuits) |
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Downtime | 10ms or less | |||
High-voltage rise time | 1 ms or less (from 20% to 80% of rating) | |||
Cooling method | Forced air-cooling | |||
Dimension W×D×H excluding protrusions | 494×701×712mm | |||
Weight | Approx. 115kg | Approx. 120kg | ||
Applicable Standard | CE |
Model | EGC-10GS | |||
TYPE | G-TYPE | S-TYPE | ||
Input specification | Phase, frequency | Three phase, 50/60Hz | ||
Input voltage | 200 to 220VAC | |||
Fluctuation range | 190 to 231VAC | |||
Input capacity | 382VA or less | |||
Leakage current | Each phase 5mA or less | |||
Output specification | X-axis magnet coil output | Variable range | 0 to ±1.5A | 0 to -3.5A |
Voltage | ±24V Max | |||
Regulation | ±2% or less | |||
Frequency | 10 to 800Hz Variable in 0.1Hz increments |
0.1 to 5Hz Variable in 0.1Hz increments |
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Waveform | Desired waveform | |||
Y-axis magnet coil output | Variable range | 0 to ±1.5A | 0 to ±1.2A | |
Voltage | ±24V | |||
Regulation | ±2% or less | |||
Frequency | 10 to 800Hz Variable in 0.1Hz increments |
0.1 to 22Hz Variable in 0.1Hz increments |
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Waveform | Desired waveform | |||
Deflection coil output (G-TYPE gun only) |
Variable range | -0.4 to -3.5A | ||
Voltage | +24V Max | |||
Regulation | ±2% or less | |||
Frequency | DC | |||
Waveform | DC | |||
Cooling method | Forced air-cooling | |||
Dimension W×D×H | 480.5×499×149mm | |||
Weight | 11.5kg | |||
Applicable Standard | CE |
* Ambient operating temperature 10 to 40ºC (no condensation)
* Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.