EB Power Generator HPS-N Series

HPS-N

The HPS-N Series is a series of power generator that support electron beam evaporation sources and feature improvements in circuit stability and performance based on technologies we have accumulated over many years and our proven track record. When used in combination with the EGC-10GS EB Gun Controller, both EG guns for optical films and EB guns for metal films can be supported.

Features

  • Requires no cooling water
    Forced air-cooling, requires no cooling water
  • High reliability
    Our accumulated knowledge as an equipment manufacturer has been reflected in the design
  • Easy to use
    The LCD touch panel used for the control panel improves ease of use
  • Sweep waveform variations
    Many beam scan forms can be created on the operating screen
  • High-speed arc shutoff function
    Configured with a circuit that minimizes decreases in deposition rate by high-speed arc shutoff
  • Low level arc control function (option for optical applications)
    Controls minute arcs that occur in optical applications to allow stable deposition

Applications

  • Vacuum evaporation for metal films
  • Vacuum evaporation for optical films

Specifications

Model HPS-600N HPS-1000N
Input specification Phase, frequency Three phase, 50/60Hz
Input voltage 200 to 220VAC
Fluctuation range 190 to 231VAC
Input capacity 1 source 9.0kVA or less 14.0kVA or less
2 sources 10.0kVA or less 15.0kVA or less
Leakage current Each phase 5mA or less
Output specification Rated output power 1 source 6kW 10kW
2 sources 6kW
(Matched to each source output)		 10kW
(Matched to each source output)
High-voltage output voltage Variable range -2 to -6kV -4 to -10kV
Stability ±1% or less
Ripple ratio ±2%p-p or lower (at each rated output)
Beam current Variable range 0 to 1000mA
Regulation ±2% or lower (at each rated output)
Filament output Voltage 0 to 6V/12VAC
Current 0A to 45A max
High-voltage
flashover protection		 Operating method Switching method by semiconductor device
High-voltage shutoff time 1 ms or less
(high voltages off in approx. 1 second in mechanical short circuits)
Downtime 10ms or less
High-voltage rise time 1 ms or less (from 20% to 80% of rating)
Cooling method Forced air-cooling
Dimension W×D×H excluding protrusions 494×701×712mm
Weight Approx. 115kg Approx. 120kg
Applicable Standard CE

 

Model EGC-10GS
TYPE G-TYPE S-TYPE
Input specification Phase, frequency Three phase, 50/60Hz
Input voltage 200 to 220VAC
Fluctuation range 190 to 231VAC
Input capacity 382VA or less
Leakage current Each phase 5mA or less
Output specification X-axis magnet coil output Variable range 0 to ±1.5A 0 to -3.5A
Voltage ±24V Max
Regulation ±2% or less
Frequency 10 to 800Hz Variable
in 0.1Hz increments		 0.1 to 5Hz Variable
in 0.1Hz increments
Waveform Desired waveform
Y-axis magnet coil output Variable range 0 to ±1.5A 0 to ±1.2A
Voltage ±24V
Regulation ±2% or less
Frequency 10 to 800Hz Variable
in 0.1Hz increments		 0.1 to 22Hz Variable
in 0.1Hz increments
Waveform Desired waveform
Deflection coil output
(G-TYPE gun only)		 Variable range -0.4 to -3.5A
Voltage ＋24V Max
Regulation ±2% or less
Frequency DC
Waveform DC
Cooling method Forced air-cooling
Dimension W×D×H 480.5×499×149mm
Weight 11.5kg
Applicable Standard CE

* Ambient operating temperature 10 to 40ºC (no condensation)
* Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.