G-TRAN Series Multi Ionization Gauge ST2-1 / ST2-2
Don’t you have a problem with the precision of the vacuum gauge (Variation of sensitivity, error, etc.) and short life (gauge head becomes dirty and it is hard to discharge, etc)in measurement at high vacuum ?
To respond to such requests, ULVAC has developed an ionization vacuum gauge with a spec of long-life at severe environment and a measurable type with high precision.
This world’s first metal type triode ionization vacuum gauge is greatly reduce the running cost and help further improving the yield of various processes.
Even in harsh environment, this world’s first metal type triode ionization vacuum gauge will achieve long-life and shows the best advantage of the triode type.
◙ Strong Metal Vacuum Tube
robe is made of small metal which makes no worry of such damage as glass type.
◙ Improvement in the measurement accuracy
Improvement in the measurement accuracy of ±10% and excellent sensitivity stability has realized.
◙ Wide-range measurement
Wide pressure measuring range from atmospheric pressure to high vacuum range (10+5 to 10-5Pa, 760 to 7.75×10-8 Torr, 1013 to 10-7mbar).(When SPU and SAU are used together)
◙ Possible to connect gauge heads with different measurement ranges
With Multi Ionization Gauge, a gauge head is selected depending on the usage
◙ Precise measurement of atmospheric pressure
Confirming atmospheric pressure easily and accurately (when SAU is used together)
◙ Indication signal of filament life time by the electron
Monitoring the electron volume can observe the life time of filament.
◙ Low environmental burden
Capable of reducing costs as only failed gauge heads are replaced
◙ Improvement in visibility
With high visible LED for error verification
◙ Maintenance
Easy sensor head replacement
◙ Applicable standard
Conforms with CE
◙ Measurement of ultimate pressure at various industrial vacuum equipment such as vacuum furnaces.
◙ Measurement under atmosphere which include hydrocarbon (oil-based).
◙ When processing of vacuum parts, measurement under atmosphere where oil and lavage remain potentially.
◙ Measurement of vacuum equipments that wants to aim at exchange frequency reduction of sensor head.
※Please contact in case of using Corrosive gas (Halogen gas).
Model | ST2-1 | ST2-2 | |
Type name | Standard type | Serial communication type | |
Connectable sensors | ST2 gauge head SWT-16 (NW16): 1 SPU Pirani vacuum gauge measuring unit: 1 (option) SAU pressure sensor unit: 1 (option) |
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Measurable pressure range | 1×10-5 to 1×10+1 Pa | ||
Accuracy | 1×10-4 to 3 Pa: ±10% 7.5×10-7 to 2.2×10-2 Torr: ±10% 1×10-6 to 3×10-2 mbar: ±10% |
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Repeatability | 1×10-4 to 3 Pa : ±2% | ||
Sampling time | 50 ms, 5x moving average | ||
Value output | Output voltage: 0 to 10 VDC, LOG output: 0.75 V/1 decade Pressure conversion equation: V=7.25+0.75* (LogP-2) P=10^{ (V-7.25)/0.75+2}*Also combined with the output voltage for setpoint adjustment (SH2-1 only) |
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Update time | 50ms | ||
Control input signals | FIL ON/OFF, FIL 1/2, DEGAS ON/OFF Operates with open collector input, negative logic |
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Control output signals | Sensor error, setpoint 1/2/3, emission valid, filament current abnormality Rating: 24VMAX, 50mAMAX, saturation voltage 1V |
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Serial communications | RS232C、RS-485 | ||
LED display | POWER/ERROR: Power, error LED FIL: B-A gauge filament status indicator |
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SET1 to 3 Setpoint 1 to 3 LED | |||
Emission current | 2mA (1×10-2 Pa or lower), 10μA | ||
Degas Method | Electron bombardment – Emission current 2mA, grid voltage approx. 330V | ||
Maximum pressure of sensor |
B-A: 2×10+5 Pa (absolute pressure) * Take the withstand pressure for flanges, clamps, and other components into account separately. | ||
Internal volume of sensor | SWT-16: 17cm3 | ||
Operating temperature range | 10 to 50℃ | ||
Operating humidity range | 15 to 80% RH (no condensation) | ||
Storage temperature | -20 to 65℃ (when unpowered, no condensation) | ||
IP rating | IP30 | ||
Power supply voltage | 20 to 28 VDC (ripple, noise 1% or lower) Steady state 8W, Degas 19W or lower, 6A or lower when power supply turned on (4m) |
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Input/output connector | D-sub15-pin 2.6mm screws | ||
Weight | Controller: Approx. 530g, Gauge head (SWT-16) 80g | ||
Dimension | 183.8×75×62.2mm | ||
Applicable standard | CE standards | ||
Options | Multi Ionization Sensor head |
SWT-16 (NW16) material of gas contacting sections: Filament: Ir/Y2O3 -coated PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating |
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Pirani Vacuum Gauge | SPU | ||
Pirani Vacuum Sensor head | WP-16 (NW16) Material of gas contacting sections: Filament-Pt, BS/Ni plating, Ni, solder |
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Pressure sensor | SAU (NW16) Material of gas contacting sections: SUS316L | ||
Unit cable | 0.5m for SPU/0.5m for SAU | ||
Display unit | 1CH: ISG1 (DC24V) 4CH: IM1R1 (DC24V)/IM2R1 (AC100V) |
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Display cable | Cable between ST2 and display unit 2m, 5m, 10m, 15m, 20 |
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Input/output conector (D-sub 15-socket (M2.6mm screw)) | |||
Inspection result data sheet, General calibration test report, JCSS caribration certificate |
>> Mode Specifications
ST2 have three options; simple mode with a multi ionization gauge, combination mode with a multi ionization gauge and a pirani gauge (SPU), and triple combination mode with a multi ionization gauge, a pirani gauge (SPU) and a pressure switch.
Mode | ST2 Simple mode |
ST2+SPU Combination mode |
ST2+SPU+SAU Triple combination mode |
Measurable pressure range |
1×10-5 ~ 1×10+1Pa | 1×10-5 ~ 1×10+4Pa | 1×10-5 ~ 1×10+5Pa |
Accuracy | 1×10-4 to 3Pa : ±10% 3 to 1×10+1Pa : ±15%7.5×10-7 to 2.2×10-2 Torr: ±10% 2.2×10-2 to 7.5×10-2 Torr: ±15%1×10-6 to 3×10-2 mbar: ±10% 3×10-2 to 0.1 mbar: ±15% |
1×10-4 to 3Pa : ±10% 3 to 1×10+3Pa : ±15% 1.0×10+3 to 3.0×10+3Pa : ±30%7.5×10-7 to 2.2 10-2 Torr: ±10% 2.2×10-2 to 7.5 Torr: ±15% 7.5 to 22.5 Torr: ±30%1×10-6 to 3×10-2 mbar: ±10% 3×10-2 to 10 mbar: ±15% 10 to 30 mbar: ±30% |
1×10-4 to 3Pa : ±10% 3 to 1×10+3Pa : ±15% 1.0×10+3 to3.0×10+3Pa : ±30% 1.0×10+4 to 1.0×10+5Pa : ±3%F.S.7.5×10-7 to 2.2 10-2 Torr: ±10% 2.2×10-2 to 7.5 Torr: ±15% 7.5 to 22.5 Torr: ±30% 75 to 760 Torr: ±3% F.S.1×10-6 to 3×10-2 mbar: ±10% 3×10-2 to 10 mbar: ±15% 10 to 30 mbar: ±30% 100 to 1013 mbar: ±3% F.S. |
Repeatability | 1×10-4 ~ 3Pa : ±2% |
▇ Secret of strength of the ST2 ▇