High-speed Spectroscopic Ellipsometer
UNECS-1500A/2000A/3000A (Auto Mapping Stage)
Automatic Stage Type with Mapping Function
UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
3 models are available for φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.
- High-speed Measurement :
The snapshot measurement method is realized and the high-speed measurement is 20ms per point.
- Visible Spectral Range :
The spectral wavelength range can be selected. The standard type is 530nm to 750nm and the visible spectral type is 380nm~760nm.
- Compact Sensor Unit :
The sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.
- Strong Product-line :
There is a strong products line with the portable type, the manual/automatic stage type, the built-in type and the large substrate type etc.
- Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)
|Wavelength Range||530 to 750nm or 380 to 760nm|
|Spot Size||φ1mm or φ0.3mm|
|Angle of Incidence||70º|
|Film Thickness Repeatability||1σ = 0.1nｍ|
|Film Thickness Measurement Range||1nｍ to 2μｍ|
|Measurment Time||Sampling : 20ms to 3000ms Analyzing time : 300ms|
|Maximum Automatic Measurable Points||200||200||2,000|
|Control PC||Laptop PC including analysis software|
Control unit. Control PC (Laptop type) and operation manual (CD).