High-speed Spectroscopic Ellipsometer
UNECS-1M (Integration)

UNECS-1M

Built-in Type for System Integration

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

UNECS-1M, the light weight and compact design sensor head, is capable to be integrated into various equipments. It is suitable for both of vacuum and atmospheric pressure environments.

Features

  • High-speed Measurement :
    The snapshot measurement method is realized and the high-speed measurement is 20ms per point.
  • Visible Spectral Range :
    The spectral wavelength range can be selected. The standard type is 530nm to 750nm and the visible spectral type is 380nm~760nm.
  • Compact Sensor Unit :
    The sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.
  • Strong Product-line :
    There is a strong products line with the portable type, the manual/automatic stage type, the built-in type and the large substrate type etc.

Applications

  • Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)

Specifications

Wavelength Range 530 to 750nm or 380 to 760nm
Spot Size φ1mm or φ0.3mm
Angle of Incidence 70º
Film Thickness Repeatability 1σ = 0.1nm
Film Thickness Measurement Range 1nm to 2μm
Measurment Time Sampling : 20ms to 3000ms Analyzing time : 300ms
Installation Environment Atmosphere or vacuum
Configuration Measurement unit. Control box. Light source unit.
Operation manual (CD). Analysis software (CD).