High Temperature Rapid Thermal Annealing System HT-RTA59HD

Infrared Gold Image Furnace / RTA System

This desktop ultra-high temperature annealing system achieves high reflection efficiency by heating in a focused manner precious materials like SiC and other small materials with high melting points and is capable of heating up to ultra-high temperature range of 1800 °C

Applications

• Oxide film formation in SiC(GaN) power device process, Research and development of activation annealing

• Research and development of semiconductor process

• Heat treatment of glass substrate, ceramics, composite materials etc.

• Thermal shock tests of ceramics materials

• Various heat treatment tests such as sintering of metal materials with high melting points

• Usable as a temperature gradient furnace

• Usable as a heating furnace for gas analysis

Features

• Capable of heating up to ultra-high temperature of 1800 °C in 10 seconds

• Spot focused furnace with high-power lamps built on ellipsoidal reflective surface

• Cold Wall enables rapid-heating & cooling and clean-heating

• Desktop type with a heating furnace integrated with a quartz chamber

• Easy input of temperature recipe through PC connected with USB

• Capable of displaying temperature data on PC screen during the heating (Saving data in a text file is also available.)

Specifications

Type	HT-RTA59HD
Temperature range	Room Temperature to 1800 °C (max. 2000 °C)
Sample size	15 mm square x 1 mm thickness
Temperature control sensor	JIS thermocouple type B (W-Re is also available)
Power supply	AC 200 V 40 A 8 kW
Cooling water	0.3MPa Approx 5L/min
Lamp cooling gas	Dry air Approx 200L/min
Outside dimensions (mm)	Approx W410 x D450 x H840 (excluding protrusion)
Weight	Approx 45kg

System diagram

❶ For lamp cooling Air GAS INLET ❷ GAS OUTLET ❸ N₂ GAS INLET ❹ Ar GAS INLET

❺ Lamp ❻ Transparent quartz protective tube ❼ Sample

❽ Slider to move the sample into/out of the furnace (Manual operation)

Heating property

Maximum achieving temperature

The power supply 7kW（max）
Measurement W-Re thermocouple
Heating atmosphere N₂ 1L/min
Attainment Temperature 2157℃ (Approx 200℃/sec heating up to 2000℃)

Rapid heating control

Temperature recipe 200℃/s holding time 5 min.
Heating atmosphere N₂ 100cc/mm
Sample holder High purity carbon
Sample Susceptor High purity carbon

Sample holder and susceptor

Option

• Vacuum exhaust system (RP, DRY, TMP etc.)
• Gas piping system (From 2nd system)
• Cooling water circulator
• Cooling air generator system
• Handy spot welder (HS-9000)
• Handy arc welder (HA-1H)