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The VAH Series are manual high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. They enable conductance to be easily adjusted.
- O-ring shaft seals draw little air into valves.
- Simpler structure makes maintenance easy.
- Use of aluminum alloy enables more lightweight design.
- Use of link mechanism enables more compact design.
- Low vibrations
- Low cost
- Evacuation system lines on vacuum equipment
Model | VAH |
Nominal size A (B) | 100A(4B), 150A(6B) |
Valve material | Aluminum alloy (internal parts: mild steel, nickel plating) |
Gasket material | Nitryl rubber |
Permitted baking temperature (ºC) | <60 |
Operating pressure range (Pa) | 105 to 10-5 |
Leak rate (Pa·m3/s) | -9 (*1) |
Permitted ambient temperature (ºC) | 5 to 40 |
Operation type | Manual |
Back-pressure | Supported as standard feature. |
Remarks | Fluororubber parts are available (option). |
Note:1. | This specification uses SI measurement units. Conversion to non-SI units is as follows: 1 Pa = 7.5 x 10-3 torr |
2. | Ensure that maximum differential pressure for valve OPEN/CLOSE operations is no more than 1000 Pa. |
*1 a. | Seal characteristic value in static state. Leak rate doesn't include O-ring permeation rate. |
b. | Air adhering to shaft may be drawn in during valve operation, increasing apparent leak rate. |