The VAH Series are manual high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. They enable conductance to be easily adjusted.
- O-ring shaft seals draw little air into valves.
- Simpler structure makes maintenance easy.
- Use of aluminum alloy enables more lightweight design.
- Use of link mechanism enables more compact design.
- Low vibrations
- Low cost
- Evacuation system lines on vacuum equipment
|Nominal size A (B)||100A(4B), 150A(6B)|
|Valve material||Aluminum alloy (internal parts: mild steel, nickel plating)|
|Gasket material||Nitryl rubber|
|Permitted baking temperature (ºC)||<60|
|Operating pressure range (Pa)||105 to 10-5|
|Leak rate (Pa·m3/s)||-9 (*1)|
|Permitted ambient temperature (ºC)||5 to 40|
|Back-pressure||Supported as standard feature.|
|Remarks||Fluororubber parts are available (option).|
|Note:1.||This specification uses SI measurement units. Conversion to non-SI units is as follows:
1 Pa = 7.5 x 10-3 torr
|2.||Ensure that maximum differential pressure for valve OPEN/CLOSE operations is no more than 1000 Pa.|
|*1 a.||Seal characteristic value in static state. Leak rate doesn't include O-ring permeation rate.|
|b.||Air adhering to shaft may be drawn in during valve operation, increasing apparent leak rate.|