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ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.
- Due to ULVAC's unique differential pressure mechanism the ULVAC VFR pendulum valve minimizes particles, valve wear, and vibration during normal operating conditions.
- The valve casing is easily removed without removing the valve from vacuum system or pump. After removing the valve casing, the valve plate can be removed only picking a bolt, and the the valve is readily maintained.
- The ULVAC VFR series valves can be installed anywhere in vacuum system. Free rotation and installment angle is flexible (360-degrees).
- Large display manufacturing systems
- OLED manufacturing systems
- Other vacuum systems as main valve and gate valve
Model | VFR-400 | VFR-500 |
Common port diameter | φ400mm | φ500mm |
Flange specification (JIS B2290 equivalency) |
VF400 | VF500 |
Open/close specification | 2 positions | |
Open/close operation principle | Pneumatic | |
Open/close time | 8sec | 12sec |
Valve plate seal | Reverse pressure capable | |
Open conductance | 50000L/s | 90000L/s |
Pressure range | 1.0×10-5 to 120000Pa(abs) 7.5×10-8 to 900Torr 1.0×10-7 to 1200mbar |
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Allowable baking temperature (at stopped) |
Valve body : < 120℃ Cylinder : < 80℃ Valve body : < 248F Cylinder : < 176F |
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Allowable ambient temperature | 10 to 80℃ 50 to 176F |
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Allowable Gass temperature | 10 to 80℃ 50 to 176F |
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Compressed air pressure | 0.50 to 0.70MPaG 72.5 to 101.5psi 5.0 to 7.0bar |
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Compressed air supply port | φ8 tube connection | |
Maintenance cycle | 100000 | |
Mouting angle | Free | |
Main parts material | Valve body : AC4CH-T6 Seal plate : AC4CH-T6 |
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Seal material | Vacuum side:FPM | |
Oil | Z300 | |
Weight | 98kg | 155kg |
Flange to flange dimension | 150mm | 170mm |