ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.
- Due to ULVAC's unique differential pressure mechanism the ULVAC VFR pendulum valve minimizes particles, valve wear, and vibration during normal operating conditions.
- The valve casing is easily removed without removing the valve from vacuum system or pump. After removing the valve casing, the valve plate can be removed only picking a bolt, and the the valve is readily maintained.
- The ULVAC VFR series valves can be installed anywhere in vacuum system. Free rotation and installment angle is flexible (360-degrees).
- Large display manufacturing systems
- OLED manufacturing systems
- Other vacuum systems as main valve and gate valve
|Common port diameter||φ400mm||φ500mm|
(JIS B2290 equivalency)
|Open/close specification||2 positions|
|Open/close operation principle||Pneumatic|
|Valve plate seal||Reverse pressure capable|
|Pressure range||1.0×10-5 to 120000Pa(abs)
7.5×10-8 to 900Torr
1.0×10-7 to 1200mbar
|Allowable baking temperature
|Valve body : < 120℃
Cylinder : < 80℃
Valve body : < 248F
Cylinder : < 176F
|Allowable ambient temperature||10 to 80℃
50 to 176F
|Allowable Gass temperature||10 to 80℃
50 to 176F
|Compressed air pressure||0.50 to 0.70MPaG
72.5 to 101.5psi
5.0 to 7.0bar
|Compressed air supply port||φ8 tube connection|
|Main parts material||Valve body : AC4CH-T6
Seal plate : AC4CH-T6
|Seal material||Vacuum side：FPM|
|Flange to flange dimension||150mm||170mm|