ULVAC’s unique approach to utilize the generated heat from within the dry pump
body allows the LR/HR/UR series to perform even in the most stringent processes.
ULVAC has focused the design efforts into maintaining an extremely uniform
high temperature throughout all pump stages making this series pump optimal
for CVD and etch applications. ULVAC’s ECO-SHOCK can be added to
the LR pump for additional energy savings of up to 70% for any light processes
including pumping air or nitrogen.