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| Model | 10AIV | 10AIV-FM | 10AIV-F |
| Connection flange (*1) | Diameter: 15 | UFC034-FH | UFC070-FH |
| Valve material | Valve body, disk: Stainless steel | ||
| Gasket material | Fluororubber | ||
| Permitted baking temperature (ºC) | 150 max. | ||
| Operating pressure range (Pa) | 105 to 10-8 | ||
| Leak rate (Pa·m3/s) | -11 (*2) | ||
| Permitted ambient temperature (ºC) | 5 to 40 | ||
| Operation type | Manual | ||
| OPEN/CLOSE signal output | Can't be attached. | ||
| Note: 1. | This specification uses SI measurement units. Conversion to non-SI units is as follows:1 Pa = 7.5 x 10-3Torr |
| 2. | Ensure that maximum differential pressure for valve OPEN/CLOSE operations is no more than 100 Pa. |
| *1 | UFC034-FH and UFC070-FH are ULVAC-standard stainless steel knife-edge metal seal flanges. |
| *2 | Value doesn't include O-ring permeation. |