By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
- These pumps use no oil in the pumping chamber resulting in stable performance even when evacuating water vapor or solvent vapors.
Model
|
PMB- 040C |
PMB- 060C |
||
Actual pumping speed *1 | 50Hz | 3800m3/h (63300L/min) |
6200m3/h (103300L/min) |
|
60Hz | ||||
Maximum suction pressure
|
50Hz | 8.0 x 102Pa | ||
60Hz | ||||
Ultimate pressure *2 | 6.7 x 10-1Pa | |||
Allowable drive pressure | 1.0 x 103Pa | |||
Motor (number of poles) *3 | 15kW (4P) | 18.5kW (4P) | ||
Oil *4 | ULVOIL R-7 | |||
Oil capacity | 8.0L | |||
Cooling water | Cooling method | Water cooling | ||
Primary side pressure | 0.3MPa | 0.1 to 0.3MPa | ||
Inlet/outlet differential pressure | 0.05MPa | |||
Cooling water volume | 10L/min | |||
Cooling water temperature | 5 to 30ºC | |||
Suction diameter JIS B 2290 | Corresponds to VG250 | Corresponds to VG300 | ||
Exhaust port diameter JIS B 2290 | Equivalent to VF150 | Equivalent to VF200 | ||
External dimensions L x W x H *5 |
764 x 1230 x 707mm | 764 x 1470 x 707mm | ||
Weight | 970kg
(without motor) |
1100kg
(without motor) |
||
Standard backing pump | PKS-070 | PKS-070 x 2 |
Note : | SI units are used in this specification. The following conversion can be used for non-SI units. Ultimate pressure: 6.7×10-1 Pa = 5×10-3 Torr, Pressure: 0.05/0.1/0.2/0.3 Mpa = ~0.5/0.1/2/3 atmospheres |
*1 | Measured value at 13 Pa |
*2 | Measured by pirani vacuum gauge (with standard backing pump and oil). The value would be 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge. |
*3 | 200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase |
*4 | Pump oil types other than the standard type are available. Contact ULVAC. |
*5 | W = width, D = depth, H = height |