PRCseries

 

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.

Features

  • Oil-free
    No oil in the pump casing, results in stable performance even when evacuating water vapor or solvent vapors.
  • Canned motor
    Using of canned motor could avoid using mechanical seal between atmosphere and vacuum. It can be used in clean environment without oil leak concern.
  • Excellent Corrosion Resistant Surface Treatment
    Anodic oxide coating for surface hardness and corrosive resistance on main parts can prevent scratch and corrosion inside the pump. Nonsurface treatment can be selected as option.
  • Atmospheric Pressure Start type for Shorter Evacuation Type (Option: Inverter)
    This type can shorten pumping time compared with standard type because the pump starts at the same time of roughing pump.

Applications

  • Evaporation, sputtering, ion plating
  • Vacuum dryer, freeze dryer, vacuum degassing
  • Analytical instruments, leak test system
  • Gas exchange, filling, vacuum insulating
  • Heat treatment, melting furnace
  • Other various kind of vacuum system

Specifications

Model
PRC-003A PRC-006A PRC-012A PRC-018A
Maximum pumping speed 50Hz m3/h 280 500 1000 1500
L/min 4670 8330 16700 25000
cfm 165 294 590 885
60Hz m3/h 330 600 1200 1800
L/min 5500 10000 20000 30000
cfm 194 353 706 1062
Maximum suction pressure 50Hz Pa 1.2 x 103 1.3 x 103 1.2 x 103
Torr 9 10 9
mbar 12 13 12
60Hz Pa 9.3 x 102 1.1 x 103 9.3 x 102
Torr 7 8.2 7
mbar 9.3 11 9.3
Maximum allowable differential pressure 50Hz Pa 4.0 x 103 7.3 x 103 4.3 x 103
Torr 30 55 32
mbar 40 73 43
60Hz Pa 3.3 x 103 6.0 x 103 3.2 x 103
Torr 25 45 24
mbar 33 60 32
Ultimate pressure *1 Pa 4.0 x 10-1 6.7 x 10-1
Torr 3.0 x 10-3 5.0 x 10-3
mbar 4.3 x 10-3 6.7 x 10-3
Allowable drive pressure Pa to 1.0×105 (atmospheric pressure start type)
Torr to 760 (atmospheric pressure start type)
mbar to 10000 (atmospheric pressure start type)
Motor *2 kW (poles) 0.75 (2) 2.2 (2) 3.7 (2) 5.5 (2)
HP (poles) 1 (2) 3 (2) 5 (2) 7.5 (2)
Oil *3 ULVOIL R-4
Oil quantity L 0.7 1.5 1.9
Cooling water Cooling method Water cooling
Primary side pressure MPa 0.3
psi 43.5
Inlet/outlet differential pressure Volume MPa 0.01 <
psi 1.45 <
L/min 2 3
Temprature *4 ºC 5 to 30
ºF 41 to 86
Inlet port VG80 / ISO80F or 100F (optional) VG100 / ISO100F (optional) VG150 / ISO150F (optional)
Outlet port/td> VF80 / ISO80F or 100F (optional) VF100 / ISO100F (optional)
Dimension (W×D×H) mm 296×575×260 356×619×320 406×759×340 406×989×340
Weight total kg 51 86 118 150
Standard roughing pump *5 VD601 VD901 VS1501 VS2401
Optional adapter flange, atmospheric pressure start type (Inverter), lubrication oil, lubrication chamber evacuation
*1  Measured by Pirani vacuum gauge. It will be about 4.0 x 10-2Pa when measured by  MacLeod vacuum gauge.
*2  AC200V (50Hz/60Hz), AC220V (60Hz), 3Phase. Other voltage is available upon request.
*3  Synthetic (R-7000) or fluorine oil (J25F) is selectable as option
*4  Please use it in the environment of no be dewy when the temperature of cooling water is low.
*5  Performance of these pumps could change depending on roughing pump. Above data is based on standard roughing pump.