The rotary type multi-sensor "CRTS-12NS" has been developed for the crystal oscillation type deposition controller "CRTM Series".The 5MHz crystal is 12 pieces-mountable in the rotary type crystal holder. It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.
- 12 pieces of crystals are mountable.
- Having adopted a vacuum stepping motor in the drive section, this is designed to focus on reliability and durability in top priority, including precisely controlling the stop position of the crystal too.
- The replacement of crystal is detachable together with the crystal holder.
- In case the life of crystal (abnormal oscillation) is detected, it is automatically switched to next crystal by the signal from the controller(CRTM).
- High rate, multi-layer deposition control for Optical, OrganicEL, Electric devices.
|Equipped crystal number||12 pieces|
|Capacity of crystal||5MHz AT cut crystal|
|Heat resistance temperature||350C°|
|Cooling water volume||1L / min|
|Dimension||φ104mm x H Approx.61mm|
|Digital input||INIT, CNT, STOP|
|Digital output||Sensor No., BUSY, ERROR, RETRY, END|
|Dimension W xD xH||100mm x 250mm x 99mm|