The rotary type multi-sensor “CRTS-M6” has been developed for the crystal oscillation type deposition controller “CRTM Series” .The 5MHz or 6MHz crystal is 6 pieces-mountable in the rotary type crystal holder.It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.
- Either 5 or 6 MHz 6 pieces of AT cut crystals are mountable.
- High reliability has been achieved with an original drive system that adopts the vacuum motor.
- The replacement of crystal is detachable together with the crystal holder.
- In case of the crystal failed (abnormal oscillation) is detected, it is automatically switched to next crystal by the signal from the controller(CRTM).
- The sensor head is small(50mm diameter), it is possible to install it in the evaporation deposition equipment flexibly.
- High rate,multi-layer deposition control for Optical,OrganicEL,Electric devices.
|Equipped crystal number||6 pieces|
|Capacity of crystal||5MHz or 6MHz(Selectable) AT cut crystal|
|Heat resistance temperature||350C°|
|Cooling water volume||1L / min|
|Dimension||φ50mm x H Approx.89mm|
|Digital input||INIT, CNT, STOP|
|Digital output||Sensor No., BUSY, ERROR, RETRY, END|
|Dimension W x D x H||100mm x 252mm x 99mm|