Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller CRTS-M6

The rotary type multi-sensor “CRTS-M6” has been developed for the crystal oscillation type deposition controller “CRTM Series” .The 5MHz or 6MHz crystal is 6 pieces-mountable in the rotary type crystal holder.It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.


  • Either 5 or 6 MHz 6 pieces of AT cut crystals are mountable.
  • High reliability has been achieved with an original drive system that adopts the vacuum motor.
  • The replacement of crystal is detachable together with the crystal holder.
  • In case of the crystal failed (abnormal oscillation) is detected, it is automatically switched to next crystal by the signal from the controller(CRTM).
  • The sensor head is small(50mm diameter), it is possible to install it in the evaporation deposition equipment flexibly.


  • High rate,multi-layer deposition control for Optical,OrganicEL,Electric devices.


Sensor head
Equipped crystal number 6 pieces
Capacity of crystal 5MHz or 6MHz(Selectable) AT cut crystal
Heat resistance temperature 350C°
Cooling water volume 1L / min
Weight 1kg
Dimension φ50mm x H Approx.89mm
Digital input INIT, CNT, STOP
Digital output Sensor No., BUSY, ERROR, RETRY, END
Utility DC24V, 3.0A
Dimension  W x D x H 100mm x 252mm x 99mm