Optical Process Monitor Optius

Enable to monitor the situation of various processes in real time by measuring an emission spectrum of the plasma. Optimum for feedback control of the MFC by the reactive sputtering process and endpoint detection of the etching process.


  • Broad measurement wavelength
    Measurement wavelength range is 200 to 1000nm, it is also possible to measure simultaneously specified multiple wavelengths
  • Simultaneous measurement of up to 5ch
    Addition of the Expansion unit (ESC) options enable simultaneous measurement of up to 5ch
  • Feedback control
    Feedback control of external equipment by measurement result.
  • Exclusive software
    Exclusive software corresponding to multiple processes including the reactive sputtering and etching is included.
  • Two kinds of light receiving units
    Receiver unit can be selected from atmosphere type or vacuum type depending on the application.


  • Feedback control of MFC and process monitoring in reactive sputtering
  • Endpoint detection by the plasma etching process
  • Confirmation of the cleaning and initialization status of Etching and CVD equipments


Model Optius
Number of measurement channel 1ch : Main unit (TSC)
Maximum 5ch : Add an expansion unit options (ESC)
Wavelength range 200 to 1000nm
Optical resolution *1 1.7nm (FWHM)
Integration time 1 to 1000ms
PID control cycle time 100 to 1000ms
Number of measurement wave length *2 10
Number of wavelengths that PID control is possible *2 1
Number of wavelength operation processing *2 10
Number of discriminant processing *2 10
Analog input Channel 3ch (Per measurement ch), Max 15ch (At 5ch measurement)
Signal Massflow Rate, Power surplly voltage, Pressure level
Voltage 0 to +5V or 0 to +10V
Analog output Channel 4ch (Per measurement ch), Max 20ch (At 5ch measurement)
Signal Massflow control, Wave length strength, Calculation result
Voltage 0 to +5V or 0 to +10V
Disital input Channel 4ch (Per measurement ch), Max 20ch (At 5ch measurement)
Disital output Channel 4ch (Per measurement ch), Max 20ch (At 5ch measurement)
Signal Valve close, Set point, Pressure alarm, Error
Connection with PC *3 LAN (1000BASE-T/100BASE-TX)
Dimensions (W×D×H) Main unit (TSC) : 250×300×121mm
Expansion unit (ESC) : 50×300×121mm
Weight Main unit (TSC) : 4.9kg
Expansion unit (ESC) : 1.3kg
Power AC100 to 240V (50/60Hz)
Consumed power 60W (5ch)
Operating environment Temperature : 10 to 40ºC
Humidity : 15 to 80% RH (Non condensing)
*1 This value is a reference.
*2 Number of the simultaneous measurement processing per measurement ch
*3 PC is not included. For the specifications of PC, please refer to the standard specifications.