Pulsed DC Power generators DPG-P Series [DPG-5P/DPG-10P]
The DPG-5P/10P are 5kW/10kW pulsed dc power generators for reactive sputtering. This power generator change the minus output voltage in to plus voltage, and discharge the storage electron voltage of target surface. By this, yield and throughput improvement is realized.
- High throughput
Makes high power input possible by reducing abnormal discharge
- Reduces substrate damage
Capable of reducing substrate damage caused by arcs
- Variable inversion pulse frequency
Possible range: 10kHz to 250kHz
- Capable of large capacities through master/slave connections
Up to six units can operate in parallel(The same model is available)
- Corresponding to DC output
It cancels a pulse function and can output DC
- Reactive sputtering equipment for FPD
- Reactive sputtering equipment for industrial coating
- Reactive sputtering equipment for color TFT
|Rated input Voltage||208VAC|
|Input voltage fluctuation range||187～229VAC|
|Phase, fequency||Three phase, 50/60Hz|
|Maximum rated power||5kW||10kW|
|Oscillating fequency||10kHz ～ 250kHz|
|Reverse Time||0.4 to 5μs, variable※※2|
|Control method||Constant power control (P control) / Constant current control (I control) /Constant voltage control (V control)|
|Control precision||0.5% of Maximuml power or ±1% of set point,whichever is greater|
|Control compensation range||Constant power control, 10 to 100% of rated power value|
|Parallel operation||Up to 6units can be controlled by master/slave communication|
|Cooling method||Forced air-cooling|
|Dimension (WxDxH) (excluding protrusions)||483mm×630mm×133mm|
|Applicable standard||CE / SEMI F47 / RoHS|
Ambient operating temperature 5°C ～ 40°C（no condensation）
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1： The rated voltage is restricted to 650V by more than 155 kHz of frequency.
※2： The reverse time is subject to a limit at frequency more than 81kHz.