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CRTM-9200 is a quartz crystal deposition controller that provides low-rate deposition control and high-precision film thickness control with an outstanding film thickness/rate resolution (0.0022Å ). An option enables deposition control for up to 4 materials simultaneously.
- Ideal for low-rate deposition control with outstanding film thickness/rate resolution (0.0022Å)
- Deposition control for 4 materials simultaneously (with option).
- Control of multilayer films with up to 99 layers
- Programs can be saved on USB memory .
- Can measure film thicknesses accurately, referencing history of films deposited on crystal oscillator (MLC function).
- Film thickness and rate control at Evaporation
Film thickness/rate resolution | 0.0034 Å (4 MHz crystal)
0.0022 Å (5 MHz crystal) 0.0015 Å (6 MHz crystal) |
Film thickness display range/display resolution | 0.001kÅ to 999.9kÅ /1Å |
Deposition rate display range/display resolution | 0.001 to 999.9Å/s / 0.001Å/s |
Supported sensor frequency | 4MHz,5MHz, 6MHz |
Number of sensors that can be attached | 2 (up to 8 with option) |
Sampling rate | 250ms |
Number of multilayer film layers supported | 99layers |
Number of deposition programs | 128 |
Digital I/O | input : 12 channels programmable
output : 16 channels programmable |
Analog outputs | POWER (0 to 0.99 V) (RATE and THK are option.) |
External dimensions (W x D x H; mm) | 480 x 353 x 149 |