CRTM-9200 is a quartz crystal deposition controller that provides low-rate deposition control and high-precision film thickness control with an outstanding film thickness/rate resolution (0.0022Å ). An option enables deposition control for up to 4 materials simultaneously.
- Ideal for low-rate deposition control with outstanding film thickness/rate resolution (0.0022Å)
- Deposition control for 4 materials simultaneously (with option).
- Control of multilayer films with up to 99 layers
- Programs can be saved on USB memory .
- Can measure film thicknesses accurately, referencing history of films deposited on crystal oscillator (MLC function).
- Film thickness and rate control at Evaporation
|Film thickness/rate resolution||0.0034 Å (4 MHz crystal)
0.0022 Å (5 MHz crystal)
0.0015 Å (6 MHz crystal)
|Film thickness display range/display resolution||0.001kÅ to 999.9kÅ /1Å|
|Deposition rate display range/display resolution||0.001 to 999.9Å/s / 0.001Å/s|
|Supported sensor frequency||4MHz,5MHz, 6MHz|
|Number of sensors that can be attached||2 (up to 8 with option)|
|Number of multilayer film layers supported||99layers|
|Number of deposition programs||128|
|Digital I/O||input : 12 channels programmable
output : 16 channels programmable
|Analog outputs||POWER (0 to 0.99 V) (RATE and THK are option.)|
|External dimensions (W x D x H; mm)||480 x 353 x 149|