Quartz Crystal Oscillation Type Deposition Controller
The CRTM-6000G is a deposition controller with excellent cost / performance features.
Unit offer a wide depostion control range for single as well as multilayer films.
- Two sensors can be switched for deposition control.
(The simultaneous measurement cannot be done. It is a switch type.)
- Low rate deposition process control is possible with high resolution of film thickness.
- Excellent response is obtained with a sampling rate of 125 ms.
- Up to 99 deposition programs can be stored with battery backup.
- Memory of the controller can record up to 30 process sequences.
- RS232C interface is included as standard. Control from a PC is therefore simple.
- The 12ch digital input/output signals is programmable.
- The 3ch analog output signals (Power, Rate, Thickness) is programmable.
- Up to 3 steps can be input for pre-heating and rate control for more precise control.
- Film thickness and deposition rate control during evaporation.
|Film thickness/rate resolution||0.041 Å (5 MHz)
0.029 Å (6 MHz)
|Film thickness display range / display resolution||0.001kÅ to 999.9kÅ / 1Å|
|Deposition rate display range / display resolution||0.1 to 999.9Å/s / 0.1Å/s|
|Supported sensor frequency||5MHz, 6MHz|
|Number of sensors that can be attached||Single sensor: 2
(The simultaneous measurement
cannot be done. It is a switch type. )
Multi sensor: 1
|Number of multilayer film layers supported||99layers|
|Number of deposition programs||99|
|Digital I/O||Input : 12channels programmable
Output : 12channels programmable
|Analog outputs||3ch programmable|
|External dimensions W x D x H||240mm x 350mm x 99mm|