Ultra-High Vacuum Linear Feedthroughs
TSU Series

TSU Series Ultra-High Vacuum Linear Feedthroughs

The TSU Series are linear feedthroughs enabling objects in vacuum chambers at ultra-high vacuum pressure to be moved linearly from the vacuum system's atmosphere side. When the handle on the atmosphere side is turned, the shaft on the vacuum side moves in a linear direction.


  • Low outgas emission, ideal for ultra-high vacuum.
  • Bearings, and mechanism for converting rotation to linear movement are on atmosphere side, enabling lubricant-free components on vacuum side.
  • Each complete turn of handle corresponds to 1 mm movement of shaft, enabling fine adjustments.
  • Can be fixed at any position.


  • Manual linear movement in ultra-high vacuum systems


Model TSU-15FM TSU-15F TSU-40F
Linear movement distance 15mm 40mm
Linear movement distance per complete turn 1mm/rotation
Smallest calibration 0.05mm 1mm
Drive shaft diameter M6 8mm diameter
Connecting flange UFC034 UFC070
Weight 0.7kg 1.2kg 1.4kg
Leak rate 1.3 x 10-11 Pa·m3/s max.
Heating temperature 150ºC max. 250ºC max.