Vacuum Transfer Platform NCH Series
- Connection port can be broadly chosen from 4 (quadrangle) a maximum of 8 (octagon).
- Load lock chamber corresponding to 25 slot wafer cassette is equipped standardly.
- Vacuum pumps and vacuum gauges are options.
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
|Wafer size||Max 300mm|
|Connection port||4 to 8|
|Load lock||25 slot wafer cassette|
|Pump / Vacuum Gauge||Option|