Vacuum Transfer Platform NCH Series

nch4000

NCH series is vacuum transfer platform that combines robot, core chamber and load lock.

Features

  • Connection port can be broadly chosen from 4 (quadrangle) a maximum of 8 (octagon).
  • Load lock chamber corresponding to 25 slot wafer cassette is equipped standardly.
  • Vacuum pumps and vacuum gauges are options.

Applications

  • Automatic wafer transfer for various semiconductor equipments
  • Wafer transfer for various vacuum eqipment for R&D

Specifications

Wafer size Max 300mm
Connection port 4 to 8
Robot ELEC (COVOT)
Load lock                           25 slot wafer cassette
Pump / Vacuum Gauge Option