Vacuum Transfer Robot COVOT-6


COVOT-6 comprises 4 independent arms and is the vacuum transfer robot which realized high throughput.


  • 4 independent arms are equipped, two substrates can be exchanged simultaneously.
  • 7 axis actuators and enables teaching to each of 4 arms.
  • Corresponds to the medium vacuum to 10-1Pa.


  • Automatic wafer transfer for various semiconductor equipments
  • Wafer transfer for various vacuum eqipment for R&D


Pressure range to 10-1Pa
Wafer size 300mm
Number of wafer 4
Maximum distance* 880mm
Rotation 360º Endless
Z-axis stroke 90mm
Minimum rotation diameter * 980mm
Weight capacity (hand is included) 1kg
Speed R Max 1.5sec / full stroke
θ Max 2.0sec / 180º
Z Max 1.5sec / 20mm
Position Accuracy R ±0.2mm
θ ±0.2mm
Z ±0.2mm
Teaching pendant Attached
Controller Separation type

*Changes by the arm and hand.