Vacuum Transfer Robot COVOT-6
COVOT-6 comprises 4 independent arms and is the vacuum transfer robot which realized high throughput.
- 4 independent arms are equipped, two substrates can be exchanged simultaneously.
- 7 axis actuators and enables teaching to each of 4 arms.
- Corresponds to the medium vacuum to 10-1Pa.
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
|Pressure range||to 10-1Pa|
|Number of wafer||4|
|Minimum rotation diameter *||980mm|
|Weight capacity (hand is included)||1kg|
|Speed||R||Max 1.5sec / full stroke|
|θ||Max 2.0sec / 180º|
|Z||Max 1.5sec / 20mm|
*Changes by the arm and hand.