Vacuum Transfer Robot COVOT-LC


COVOT-LC is a simple and reasonable vacuum transfer robot without the Z-axis.


  • Simple 2 axis robot without the Z axis.
  • Built-in controller enables compact equipment layout.
  • Corresponds to the high vacuum to 10-5Pa.


  • Automatic wafer transfer for various semiconductor equipments
  • Wafer transfer for various vacuum eqipment for R&D


Pressure range to 10-5Pa
Wafer size 200mm/300mm
Number of wafer 1 or 2
Maximum distance* 880mm
Rotation -15º to 375º
Z-axis stroke -
Minimum rotation diameter * 802mm
Weight capacity (hand is included) 1kg
Speed R Max 2.5sec / full stroke
θ Max 2.5sec / 180º
Z -
Position Accuracy R ±0.2mm
θ ±0.2mm
Z -
Teaching pendant Option
Controller Built-in type

*Changes by the arm and hand.