Vacuum Transfer Robot COVOT
COVOT is the wafer transfer robot in the heigh vacuum enviroment, designed based on longtime experience and technique. Rigidity is high and is superior in position precision.
- Magnetic fluid sealing is adopted as a vacuum seal, and it corresponds to the high vacuum to 10-6Pa.
- Controller and a robot into an integral type. compact equipment layout is realizable.
- 360-degree continuation rotation is possible, there are no restrictions in the attachment direction.
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
|Pressure range||to 10-6Pa|
|Number of wafer||1 or 2|
|Minimum rotation diameter *||944mm|
|Weight capacity (hand is included)||1kg|
|Speed||R||Max 2.5sec / full stroke|
|θ||Max 2.5sec / 180º|
|Z||Max 1.5sec / 20mm|
*Changes by the arm and hand.