Vacuum Transfer Robot ELEC-RZ
ELEC-RZ is the wafer transfer robot in the high vaccum environment, implemented with compact and low cost based on outstanding function and performance of COVOT series.
- Magnetic fluid sealing is adopted as a vacuum seal, and it corresponds to the high vacuum to 10-6Pa.
- Achieved a compact design by miniaturizing the actuator enables easy impelementation to the equipment.
- Offers variety of arms with various strokes, number of hands and turning radii.
- Achieved excellent operability by adopting with the multi-function display teaching pendant.
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
|Pressure range||to 10-6Pa|
|Number of wafer||1 or 2|
|Minimum rotation diameter *||944mm|
|Weight capacity (hand is included)||1kg|
|Speed||R||Max 2.5sec / full stroke|
|θ||Max 3.0sec / 180º|
|Z||Max 1.5sec / 20mm|
*Changes by the arm and hand.